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eBeam Lithography Room

  • Classification: ISO 5 and ISO 6
  • Research activities: Fabrication of nanoscale structures and nanoscale imagine.
  • Equipment: RAITH150TWO and Raith e-LiNE+
  • Lighting: Yellow

Equipment

Electron-Beam Lithography (Raith -150-TWO / E-line)

Electron-Beam Lithography photograph

E-Beam Lithography used for design and nanostructure fabrication.

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