Quanta 250 FEG

• High tension 0.5kV-30kV
• Schottky FEG
• Electron beam resolution 2.5nm at 30kV (BSE, high vacuum)
• Electron beam resolution 1nm at 30kV (SE, high vacuum)
• Working chamber pressure(H₂O or auxiliary gas) 10^-4Pa – 4000Pa
• Edax EDX SDD
• Decelerating mode (stage bias up to 4kV)

• Detectors:
  -ET SE detector
  -In Column Detector (ICD)
  -BS Si detector (BSE)
  -Large Field Gaseous SE detector (LFD)
  -Gaseous SE detector (GSED)
  -Gaseous BS detector (GBSD)
  
  
• Peltier stage (-25°C−+55°C)
• Kleindiek nanomanipulator with microinjector
• Double GIS