nanoPeople

Nanodevices group (CIC5)

Facilities

The nanodevices group has access to nanoGUNE common clean-room equipment devoted to nanofabrication.
In adittion, we have some equipment specially dedicated to our current research lines:


Deposition machines:
Ultra High Vacuum metal and organic materials evaporator
High vacuum e-beam and thermal metal evaporator
High vacuum metal sputtering
Atomic layer deposition

Nanofabrication:
Electron Beam Litography
Photolithography Mask Aligner
Ion Beam Milling

Characterization:
Variable Temperature Probe Station with in-plane magnetic field
Physical Properties Measurement System
X-Ray Diffractometer
Atomic Force Microscope




Ultra high vacuum metal and organic materials evaporator Growth of high-quality ultrathin films and multilayers


Theva Evaporator



Load Lock chamber with Ar plasma and heater treatment


Theva Evaporator



High Vacuum metal evaporator


Oerlikon Evaporator



High Vacuum metal sputtering


Leica Sputtering



Atomic layer deposition


Cambridge Nanotech Savannah S100




Electron beam lithography Ultra high resolution direct write and metrology tool


Raith 150 TWO.



Submicron optical lithography


EVG mask aligner.



Ion Beam Etching and Sputtering system.


4Wave Ion Beam Etching




Probe station with variable temperature and magnetic field. High-resolution and sensitivity measuraments of magnetic properties. Low temperature and high-field measurements of physical properties. Electrical characterization of ultrathin films and nanodevices.


Lake Shore Probe Station.



Low temperature characterization PPMS


Quantum Design PPMS



X-Ray Diffractometer


X’Pert PRO PANalytical



Atomic Force Microscope


Agilent AFM



CIC nanoGUNE Consolider
Tolosa Hiribidea 76, E-20018 Donostia - San Sebastian • +34 943 574 000 • nano@nanogune.eu