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Equipment

The nanoGUNE facilities are managed by specialists and used by researchers from a wide variety of fields.

NanoGUNE's External-Services department offers a wide range of characterization and fabrication services to external users, both academic and industrial.

NanoGUNE's equipment is presented below.

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Ion Beam Etcher (4Wave)

4Wave Ion Beam Etching photograph

Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)

Atomic-Force Microscope photograph

X-ray reflectivity/diffractometry (X'pert PRO by PANalytical)

X-ray reflectivity photograph

Quantum Design SQUID-VSM EverCool

Quantum Design photograph

Quantum Design PPMS

Magneto-Optical Kerr Effect (MOKE) set-up

Magneto-Optical Kerr photograph

Magneto-Optical Kerr Effect (MOKE) microscope

Magneto-Optical Kerr microscope photograph

UHV Sputtering System (AJA Int.)

Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker

Oerlikon photograph

ALD Cambridge Nanotech Savannah S100

ALD Cambridge Nanotech photograph

Leica EM MED020 / Quorum technologies Q150 T ES

Leica EM MED020 photograph

Electron-Beam Lithography (Raith -150-TWO / E-line)

Electron-Beam Lithography photograph

Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S

Mask aligner (EVG)

Mask aligner photograph

Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)

Environmental Scanning-electron photograph

High-resolution Transmission Electron Microscope (HRTEM)

High-resolution Transmission Electron Microscope photograph

STM/AFM (4 K) in UHV with light detection set-up

STM/AFM photograph

STM/AFM (1 K) in UHV with magnetic field

STM/AFM in UHV with magnetic field photograph

Electrospinning

Electrospinning photograph

Scattering-type near-field microscope (Neaspec)

Scattering-type near-field microscope photograph

Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)

Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB)

RAMGRABER Wet benches

Double Pack Oven, 650ºC UNITEMP RSO-650-200

Low-temperature AFM and confocal microscope

ALD Beneq TFS 200

BENEQ TFS-200

FTIR Spectrometer PerkinElmer Frontier

FTIR

High power industrial Picosecond Laser

Four point probe

Plasma asher

Universal mechanical tester (UMT)

Microscopy Platform for Materials Research

UV-NIR Spectrometry

3D Optical Profiler

Surface Plasmon Resonance Platform

NIR Raman spectroscopy

Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)

Spectroscopic ellipsometer (GES5 spectroscopic-ellipsometer SEMILAB)

FTIR Spectrometer PerkinElmer Frontier

Scattering-type near-field microscope (NeaSpec)

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