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Double Pack Oven, 650ºC UNITEMP RSO-650-200

High temperature oven used for heat treatments such a annealing and oxidation of thin film layers.

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  • Two quartz glass process chambers with integrated gas in- and outlet
  • Top and bottom heating
  • Maximum Temperature: 650ºC
  • Ramp up rate: 75ºC/s
  • Loading area (2x quartz tray): 170 mm x 200 mm
  • Vacuum for external pump system (up to 1x10-3 mbar)
  • Controller: fast PID temperature process controller, 100 steps programmable (temperature steps), free programmable process gas flow
Related Techniques: 
Related Sectors: 
Automotive industry
Glass coatings
Iron and steel industry
Machine tool manufacturers
Metallurgy
Microelectronics and semiconductor industry
Off-shore industry
Solar cell industry
Cleanroom: 
CR2 - Photo Bay
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