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Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB)

Measures a wide range of layer thicknesses and material optical properties in a non-destructive manner.

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  • Wavelength from 230 to 900 nm.
  • Possibility to measure at different incidence angles (from 40° to 77°).
  • Automatic multipoint measurements using a xy sample stage automatic movement.
  • Optional spectroscopic photometry (transmittance and reflectance) measurements.
  • Specialized software to analyze and extract optical information with a broad range material data-base.
Related Sectors: 
Material science industry
Optoelectronic and optical industry
Photovoltaic
Semiconductors
Cleanroom: 
CR4 - Deposition Bay
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