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Photo Bay

  • Classification: ISO 5 and ISO 6
  • Research activities: Optical lithography, nano-scale fabrication.
  • Equipment: EVG mask aligner, chemical wet benches, various ovens, plasma asher, microscopes
  • Lighting: Yellow

Equipment

Double Pack Oven, 650ºC UNITEMP RSO-650-200

High temperature oven used for heat treatments such a annealing and oxidation of thin film layers.

RAMGRABER Wet benches

Sample processing stations specialized for chemical and lithography processes.

Mask aligner (EVG)

Mask aligner photograph

Optical Lithography for microstructure fabrication.

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