Nanooptics Equipment
The Nanooptics Group operates home-built and commercial s-SNOM and nano-FTIR setups from Neaspec. Available light sources include HeNe lasers, CO2 lasers (900 to 1100 cm-1), quantum cascade lasers (1100 cm-1 to 1700 cm-1), a CW THz gas laser and two broadband infrared laser continuums.
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Ion Beam Etcher (4Wave) -
Quantum Design SQUID-VSM EverCool -
Magneto-Optical Kerr Effect (MOKE) microscope -
Electron-Beam Lithography (Raith -150-TWO / E-line) -
UHV Sputtering System (AJA Int.) -
Dual-beam FIB/SEM (Focused Ion Beam and Induced deposition) -
X-ray reflectivity/diffractometry (Malvern - PANalytical) -
UHV Sputtering System (AJA Int.)
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Dual-beam FIB/SEM (Focused Ion Beam and Induced deposition)
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X-ray reflectivity/diffractometry (Malvern - PANalytical)
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E-Beam and thermal evaporation - Lesker -
X-ray reflectivity/diffractometry (Malvern - PANalytical)
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E-Beam and thermal evaporation - Lesker
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Quantum Design PPMS -
ALD Cambridge Nanotech Savannah S100 -
Quantum Design PPMS
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Electron-Beam Lithography (Raith -150-TWO / E-line)
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Magneto-Optical Kerr Effect (MOKE) set-up -
Electron-Beam Lithography (Raith -150-TWO / E-line)
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High-resolution Transmission Electron Microscope (HRTEM) -
Four point probe -
STM/AFM (4 K) in UHV with light detection set-up -
STM/AFM (1 K) in UHV with magnetic field -
Mask aligner (EVG) -
Electrospinning -
Mask aligner (EVG)
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Reactive ion etcher (RIE Oxford Plasmalab 80 Plus) -
Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250) -
ALD Beneq TFS 200 -
Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
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FTIR Spectrometer PerkinElmer Frontier -
Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
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High power industrial Picosecond Laser -
Microscopy Platform for Materials Research -
UV-NIR Spectrometry -
3D Optical Profiler -
Surface Plasmon Resonance Platform -
NIR Raman spectroscopy -
Scattering-type near-field microscope (Neaspec) -
CRYO Plasma FIB