Ion Beam Etcher (4Wave)

4Wave Ion Beam Etching photograph

Ion beam etching and sputtering system.

Offered as External Service
Research group

What we can offer:

Micro and nano structure fabrication

Possibility:

  • Micro and nano structures and devices on different substrates (glass, silicon, CaF2)

  • Customized structured calibration and reference samples (microscopy, metrology).

  • Topographically changed surfaces with advanced properties (optical, mechanical, adhesion, friction).

Interesting for (with the system):

Material science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine tool manufacturers, iron and steel industry...

Cleanroom
CR3 - Etching Bay
External services title
Ion Beam Etcher (4Wave)