eBeam Lithography Room

  • Classification: ISO 5 and ISO 6
  • Research activities: Fabrication of nanoscale structures and nanoscale imagine.
  • Equipment: RAITH150TWO and Raith e-LiNE+
  • Lighting: Yellow



State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.

Facilities & Equipment

A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.


Ralph Gay

Ralph Gay

Cleanroom Manager
+34 943574015