Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB)

Spectroscopic ellipsometrer (GES5 spectroscopic-ellipsometer SEMILAB)

Measures a wide range of layer thicknesses and material optical properties in a non-destructive manner.

Technical characteristics
  • Wavelength from 230 to 900 nm.
  • Possibility to measure at different incidence angles (from 40° to 77°).
  • Automatic multipoint measurements using a xy sample stage automatic movement.
  • Optional spectroscopic photometry (transmittance and reflectance) measurements.
  • Specialized software to analyze and extract optical information with a broad range material data-base.
CR4 - Deposition Bay


The nanoGUNE cleanroom, dedicated to fabricate and characterize the properties of materials on the nanoscale, ia a 300m2 laboratory where the air purity is under strict supervision.


State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.