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The nanoGUNE cleanroom is dedicated to fabricate and characterize the properties of materials on the nanoscale. The cleanroom is approximately a 300m2 laboratory and contains an acoustically damped room for eBeam lithography processes.

The classification of the nanoGUNE cleanroom is ISO 5 (class 100), ISO 6 (class 1000), and ISO 7 (class 10000).  The air purity is under strict supervision within the cleanroom. Air quality is controlled by Filter Fan Units except for the eBeam lithography room that has a dedicated air-handling unit.

eBeam Lithography Room

nanoGUNE eBeam Lithography Room

Fabrication of nanoscale structures and imaging.

Photo Bay


Optical lithography, nano-scale fabrication.

Etching Bay


Wet and dry etching operations and nanofabrication.

Deposition Bay


Growth of nanoscale film and multilayer structures and nanoscale material characterization.

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