- Classification: ISO 5 and ISO 6
- Research activities: Optical lithography, nano-scale fabrication.
- Equipment: EVG mask aligner, chemical wet benches, various ovens, plasma asher, microscopes
- Lighting: Yellow
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.