Double Pack Oven, 650ºC UNITEMP RSO-650-200

Double Pack Oven, 650ºC UNITEMP RSO-650-200

High temperature oven used for heat treatments such a annealing and oxidation of thin film layers.

Technical characteristics
  • Two quartz glass process chambers with integrated gas in- and outlet
  • Top and bottom heating
  • Maximum Temperature: 650ºC
  • Ramp up rate: 75ºC/s
  • Loading area (2x quartz tray): 170 mm x 200 mm
  • Vacuum for external pump system (up to 1x10-3 mbar)
  • Controller: fast PID temperature process controller, 100 steps programmable (temperature steps), free programmable process gas flow
CR2 - Photo Bay
Related Techniques


The nanoGUNE cleanroom, dedicated to fabricate and characterize the properties of materials on the nanoscale, ia a 300m2 laboratory where the air purity is under strict supervision.


State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.