Atomic Layer Deposition Chamber
Atomic Layer Deposition Chamber
M. Knez, M. Beltran, D. Talavera, and M. Vila
Priority date:
Granted:
Spain (03/03/2020)
![Atomic Layer Deposition Chamber](/sites/default/files/styles/imagen_full_1024/public/portfolio/pag12.2_ctech.jpg?itok=7fd1fzOc)
Atomic Layer Deposition Chamber
Ownership and licensee
![CTECHnano](/sites/default/files/styles/ip_portfolio_logo/public/portfolio/ctechnano.png?itok=uSCtwKop)