Cleanroom
Cleanroom
The nanoGUNE cleanroom is dedicated to fabricate and characterize the properties of materials on the nanoscale. The cleanroom is approximately a 300m2 laboratory and contains an acoustically damped room for eBeam lithography processes.
The classification of the nanoGUNE cleanroom is ISO 5 (class 100), ISO 6 (class 1000), and ISO 7 (class 10000). The air purity is under strict supervision within the cleanroom. Air quality is controlled by Filter Fan Units except for the eBeam lithography room that has a dedicated air-handling unit.
eBeam Lithography Room
Fabrication of nanoscale structures and imaging.
Photo Bay
Optical lithography, nano-scale fabrication.
Etching Bay
Wet and dry etching operations and nanofabrication.
Deposition Bay
Growth of nanoscale film and multilayer structures and nanoscale material characterization.
Equipment
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.
Facilities & Equipment
A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.
