Etching Bay

  • Classification: ISO 7
  • Research activities: Wet and dry etching operations and nanoscale fabrication.
  • Equipment: Ion miller, RIE, critical point dryer, chemical wet benches, ALD.
  • Lighting: White



State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.

Facilities & Equipment

A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.


Ralph Gay

Ralph Gay

Cleanroom Manager
+34 943574015