Deposition Bay
- Classification: ISO 7.
- Research activities: Growth of nanoscale film and multilayer structures, nanoscale material characterization.
- Equipment: eBeam and thermal evaporators, sputter systems, 4 point probe, profilometer, elipsometer, microscopes.
- Lighting: White.
Equipment
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.
Facilities & Equipment
A unique infrastructure of 6 200 m2 was set up to host a cleanroom of nearly 300m2 and 15 ultra-sensitive laboratories with state-of-the-art equipment.
