Mask aligner (EVG)
Optical Lithography for microstructure fabrication.
What we can offer:
Micro structure fabrication
Micro and nano structures and devices on different substrates (glass, silicon, CaF2)
Customized structured calibration and reference samples (microscopy, metrology).
Interesting for (with the system):
Material science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine tool manufacturers, iron and steel industry...
- Possibility of contact and proximity optical lithography process
- Easily minimum size achievable of 5 μm
- Possibility to pattern areas of up to 4” wafers
- Wide range of mask types
- UV lamp (15 mW /cm2)