Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker
E-beam/Thermal Evaporator for single or multiple layer thin film growth
What we can offer:
High quality metallic coatings.
Possibility to coat a wide variety of substrates, glass, silicon, polymers...
Improve the mechanical properties of materials (hardness, corrosion, wear, friction, adhesion...)
Standard fabrication for coating systems calibration
Multilayers for sensing and metrology
Interesting for (with the system):
Solar cell industry, biotech, off-shore industry, glass coatings, microelectronics and microsystems, automotive industry, iron ad steel industry, metallurgy, machine tool manufacturers...
- Multi pocket e-beam and thermal evaporation.
- Deposited thickness control by quartz crystal monitor.
- Deposition pressure of 10-6 - 10-7 mbar.
- Sample holder: 4” compatible and possibility to heat up to 350 °C