UHV Sputtering System (AJA Int.)

We have two UHV Magnetron Sputtering system for high quality single or multiple layer thin film growth, one in the cleanroom and another one in the Deposition Laboratory.

Offered as External Service

Research group

Nanodevices

Nanomagnetism

What we can offer:

High quality metallic, dielectric or insulating coatings.
Possibility to coat a wide variety of substrates, glass, silicon, polymers...

Possibility:

Improve the mechanical properties of materials (hardness, corrosion, wear, friction, adhesion...)
Anti-reflecting coatings
Biocompatible coatings
Decorative coatings
Standard fabrication for coating systems calibration
Multilayers for sensing and metrology

Interesting for (with the system):

Solar cell industry, biotech, off-shore industry, glass coatings, microelectronics and microsystems, automotive industry, iron ad steel industry, metallurgy, machine tool manufacturers...

Technical characteristics

Confocal 7 magnetron sputtering guns (DC / RF)
RF bias available
Base pressure 10^-8 Torr
Sample holder: 4” compatible and possibility to heat (up to 850 °C) or cool the sample (liquid nitrogen cooler)
Reactive gasses: nitrogen and oxygen