Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)

ESEM provides access to studies of wet biological samples, nano-bio composites and nano-fluidic phenomena. Studies of real-time redox chemistry involving nano-objects and the imaging of fluids under microfluidic conditions are some of the topics, in which the ESEM is playing a key role.
What we can offer (with the system):
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SEM – morphological surface analysis
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STEM (Scanning Transmission Electron Microscopy) – resolution < 1 nm at 30 kV
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ESEM – non conducting samples without any coating Imaging of wet samples and liquid water
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Cryogenic cooling stage
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Possibility to inject liquid by manipulators while imaging
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In-situ electrical measurements – 3 probes, probing current 10 nA to 100 mA, probing max. voltage 100 V and probing resistance 7 Ω
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Extra-large high-resolution surface imaging (up to cm2 areas with nm resolution)
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EDX – Energy dispersive x-ray spectroscopy
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In-situ force measurement system
Possibility to fabricate (with the system):
Interesting for (with the system):
Material science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine tool manufacturers, iron and steel industry, life science, objects of cultural heritage examination, energy and petrochemical companies
- High tension 0.5 kV – 30 kV
- Schottky field emitter gun
- Electron beam resolution 2.5 nm at 30 kV (BSE, high vacuum)
- Electron beam resolution 1 nm at 30 kV (SE, high vacuum)
- Working chamber pressure (H2O or auxiliary gas) 10-4 Pa – 4000 Pa
- EDX silicon drift detector (EDAX)
- Detectors: ETD SE detector, BS Si detector (BSE), Large Field Gaseous, SE detector (LFD), Gaseous SE detector (GSED), Gaseous BS detector (GBSD)
- Peltier stage (-25 °C − +55 °C)
- Nanomanipulator with microinjection (Kleindiek)