Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)

Environmental Scanning-electron photograph

ESEM provides access to studies of wet biological samples, nano-bio composites and nano-fluidic phenomena. Studies of real-time redox chemistry involving nano-objects and the imaging of fluids under microfluidic conditions are some of the topics, in which the ESEM is playing a key role.

Offered as External Service

What we can offer (with the system):

  • SEM – morphological surface analysis

  • STEM (Scanning Transmission Electron Microscopy) – resolution < 1 nm at 30 kV

  • ESEM – non conducting samples without any coating Imaging of wet samples and liquid water

  • Cryogenic cooling stage

  • Possibility to inject liquid by manipulators while imaging

  • In-situ electrical measurements – 3 probes, probing current 10 nA to 100 mA, probing max. voltage 100 V and probing resistance 7 Ω

  • Extra-large high-resolution surface imaging (up to cm2 areas with nm resolution)

  • EDX – Energy dispersive x-ray spectroscopy

  • In-situ force measurement system

Possibility to fabricate (with the system):

Interesting for (with the system):

Material science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine tool manufacturers, iron and steel industry, life science, objects of cultural heritage examination, energy and petrochemical companies

Technical characteristics
  • High tension 0.5 kV – 30 kV
  • Schottky field emitter gun
  • Electron beam resolution 2.5 nm at 30 kV (BSE, high vacuum)
  • Electron beam resolution 1 nm at 30 kV (SE, high vacuum)
  • Working chamber pressure (H2O or auxiliary gas) 10-4 Pa – 4000 Pa
  • EDX silicon drift detector (EDAX)
  • Detectors: ETD SE detector, BS Si detector (BSE), Large Field Gaseous, SE detector (LFD), Gaseous SE detector (GSED), Gaseous BS detector (GBSD)
  • Peltier stage (-25 °C − +55 °C)
  • Nanomanipulator with microinjection (Kleindiek)
External services type
Related Applications
External services title
Scanning electron Microscopy (SEM)/(ESEM)