Journal - Journal Of Microelectromechanical Systems

1. T. Lisec, T. Reimer, M. Knez, S. Chemnitz, A. Schulz-Walsemann and A. Kulkarni
Journal Of Microelectromechanical Systems 26, 1093 (2017)
A Novel Fabrication Technique for MEMS Based on Agglomeration of Powder by ALD

Publications