Nanodevices Equipment
The nanodevices group has access to nanoGUNE's common cleanroom equipment devoted to nanofabrication. In adittion, we have some equipment specially dedicated to our research lines.
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Ion Beam Etcher (4Wave) -
Quantum Design SQUID-VSM EverCool -
Quantum Design PPMS -
UHV Sputtering System (AJA Int.) -
Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker -
Electron-Beam Lithography (Raith -150-TWO / E-line) -
Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S -
Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments) -
X-ray reflectivity/diffractometry (X'pert PRO by PANalytical) -
Four point probe -
Mask aligner (EVG) -
Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250) -
Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)