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  4. Nanodevices Equipment

Nanodevices Equipment

The nanodevices group has access to nanoGUNE's common cleanroom equipment devoted to nanofabrication. In adittion, we have some equipment specially dedicated to our research lines.

  • 4Wave Ion Beam Etching photograph
    Ion Beam Etcher (4Wave)
  • Quantum Design photograph
    Quantum Design SQUID-VSM EverCool
  • UHV Sputtering System (AJA Int.)
    UHV Sputtering System (AJA Int.)
  • Oerlikon photograph
    Oerlikon - UNIVEX 350 / EPVD75 Kurt J. Lesker
  • Electron-Beam Lithography photograph
    Electron-Beam Lithography (Raith -150-TWO / E-line)
  • Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
    Dual-beam FIB/SEM - FEI Helios Nanolab / FEI Helios 450S
  • Atomic-Force Microscope photograph
    Atomic-Force Microscope (AFM 5500 Agilent/Nano observer CSI Instruments)
  • X-ray reflectivity photograph
    X-ray reflectivity/diffractometry (X'pert PRO by PANalytical)
  • Quantum Design PPMS
    Quantum Design PPMS
  • Mask aligner photograph
    Mask aligner (EVG)
  • Environmental Scanning-electron photograph
    Environmental Scanning-electron Microscope (eSEM-FEI Quanta 250)
  • Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
    Reactive ion etcher (RIE Oxford Plasmalab 80 Plus)
  • Four point probe
    Four point probe
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