Scientific equipment and laboratories

Scientific equipment and laboratories at nanoGUNE facilities are managed by specialists and used by researchers from a wide variety of fields. The laboratory access and the use of nanoGUNE's scientific equipment requires previous authorization and booking.



The nanoGUNE cleanroom is dedicated to fabricate and characterize the properties of materials on the nanoscale. The cleanroom is approximately a 300m2 laboratory and contains an acoustically damped room for eBeam lithography processes.

The classification of the nanoGUNE cleanroom is ISO 5 (class 100), ISO 6 (class 1000), and ISO 7 (class 10000).  The air purity is under strict supervision within the cleanroom. Air quality is controlled by Filter Fan Units except for the eBeam lithography room that has a dedicated air-handling unit.



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